Cleanroom Tool Reservation System
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January 17, 2021
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Tool #9 E-beam Lithography System
Tool #11 CVD Furnace
Tool #3 PECVD System
Tool #53 Reactive Ion Etch System (RIE)
(Under Maintenance)
Tool #54 ICP Etch System
(Under Maintenance)
Tool #52 Rapid Thermal Aneal System (RTA)
Tool # 15 Karl Suss Mask Aligner
Tool #15A Quintel Mask Aligner
Tool #1 Tabletop Plasma Asher
Tool #4 E-Beam Evaporator
Tool # 5 Thermal Evaporator
Tool #6 TES Sputter System #1
Tool #58 Focused Ion Beam (FIB)
Tool #23 Surface Profilometer
Tool #24B Ellipsometer
Tool #70 Dimension 5000 AFM
Lab Cleanup
Atomic Layer Deposition
Tool #4A E-beam Evaporator 2
Tool #6A AJA Sputter System #2
Tool #70A Dimension 3100 AFM
Tool #71 Silicon Trench Etch
Tool #72 Metal Trench Etch
