Cleanroom Tool Reservation System
Log On
[ Not Logged On ]
February 26, 2020
2019
2020
2021
2022
2023
2024
2025
2026
2027
2028
2029
2030
January
February
March
April
May
June
July
August
September
October
November
December
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
Sun
Mon
Tue
Wed
Thu
Fri
Sat
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
12:30
1:00
1:30
2:00
2:30
3:00
3:30
4:00
4:30
5:00
5:30
6:00
6:30
7:00
7:30
8:00
8:30
9:00
9:30
10:00
10:30
11:00
11:30
12:00
12:30
1:00
1:30
2:00
2:30
3:00
3:30
4:00
4:30
5:00
5:30
6:00
6:30
7:00
7:30
8:00
8:30
9:00
9:30
10:00
10:30
11:00
Tool #9 E-beam Lithography System
Tool #11 CVD Furnace
Tool #3 PECVD System
Tool #53 Reactive Ion Etch System (RIE)
(Under Maintenance)
Tool #54 ICP Etch System
(Under Maintenance)
Tool #52 Rapid Thermal Aneal System (RTA)
Tool # 15 Karl Suss Mask Aligner
Tool #15A Quintel Mask Aligner
Tool #1 Tabletop Plasma Asher
Tool #4 E-Beam Evaporator
Tool # 5 Thermal Evaporator
Tool #6 TES Sputter System #1
Tool #58 Focused Ion Beam (FIB)
Tool #23 Surface Profilometer
Tool #24B Ellipsometer
Tool #70 Dimension 5000 AFM
Lab Cleanup
Atomic Layer Deposition
Tool #4A E-beam Evaporator 2
Tool #6A AJA Sputter System #2
Tool #70A Dimension 3100 AFM
Tool #71 Silicon Trench Etch
Tool #72 Metal Trench Etch
